Study on Vaporization Behavior and Detoxification of Hazardous Elements from GaAs Scrap

Duk-Hee Lee; Hyeon-Kyung Oh; Kyung-Soo Park

doi:10.7844/kirr.2025.34.2.33

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2025 Vol.34, Issue 2 Preview Page Next Page

Research Paper

Study on Vaporization Behavior and Detoxification of Hazardous Elements from GaAs Scrap GaAs 스크랩의 기화 및 유해원소 무해화 거동 연구

30 April 2025. pp. 33-42

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Abstract

GaAs, a key material for electronic and optoelectronic devices due to its excellent properties, contains As, which poses significant environmental risks during disposal, necessitating effective treatment technologies. This study established and evaluated process conditions for the stabilization and treatment of As in GaAs scrap. The results demonstrated that under low-pressure conditions (0.01 torr), the evaporation rate of GaAs significantly increased. Through sulfurization treatment with an excess sulfur ratio of S/GaAs = 9, As was effectively converted into stable sulfides, achieving a high evaporation rate of 93% at high temperatures. In the wet removal process using an NaOH solution, maintaining the condenser temperature below 10 °C enabled stable control of As concentration, identifying it as the optimal condition for the effective removal of hazardous substances. This study confirms the feasibility of a GaAs scrap treatment process for hazardous material removal and provides critical foundational data for the design and industrial implementation of pilot-scale treatment plants.

Keywords

GaAs

Arsenic

Vaporization

sulfurization

wet removal

전자 및 광전자 소자의 핵심 재료로 널리 사용되는 갈륨 비소(GaAs)는 우수한 물성에도 불구하고, 폐기 과정에서 환경에 심각한 영향을 미칠 수 있는 비소(As)를 포함하고 있어 효과적인 처리 기술 개발이 요구된다. 이에 본 연구에서는 GaAs 스크랩에서 비소를 안정화하고 처리하기 위한 공정 조건을 확립하고 평가하였다. 연구 결과, GaAs의 기화율은 저압(0.01 torr) 조건에서 크게 향상되었으며, 황화 공정을 통해 S/GaAs = 9의 과량 황을 첨가하여 비소를 안정적인 황화물로 전환함으로써 고온에서 93%의 높은 기화율을 달성하였다. NaOH 용액을 이용한 습식 제거 공정에서, 컨덴서의 온도가 10℃ 이하일 때 비소 농도의 안정적 유지를 가능하게 하여 유해 물질을 효과적으로 제거할 수 있는 최적의 공정 조건으로 도출되었다. 본 연구를 통해 GaAs 스크랩을 활용한 유해 물질 제거 공정의 실효성을 입증하였으며, 이는 향후 실증 플랜트 설계 및 산업적 활용을 위한 중요한 기초 자료로 활용될 것으로 기대된다.

키워드

GaAs

비소

기화

황화

습식 제거

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Information

Publisher :The Korean Institute of Resources Recycling
Publisher(Ko) :한국자원리싸이클링학회
Journal Title :Resources Recycling
Journal Title(Ko) :자원리싸이클링
Volume : 34
No :2
Pages :33-42
Received Date : 2025-01-09
Revised Date : 2025-02-17
Accepted Date : 2025-02-18
DOI :https://doi.org/10.7844/kirr.2025.34.2.33

Resources Recycling ISSN:2765-3439(Print) 2765-3447(Online) 자원리싸이클링

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